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For
cooling water, compressed air and electrical
& mechanical parts
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DEMENSIONS
AND WEIGHT
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Length
:
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approx.
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11,200
mm
(chamber open)
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width
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approx.
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7,300
mm
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Height
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approx.
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3,800
mm
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Depth
of pit
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No
pit for diffusion
pump
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ELECTRICAL
SERVICES
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Volage
:
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400
V +6%/-10%
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approx.
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60Hz,
3 Phase PE
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Connected
load :
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approx.
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160
~ 180 kVA
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Average
consumption
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approx.
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82
~ 100 KW
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COOLING
WATER
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Inlet
Pressure :
|
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4
~ 6 bar
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Pressure
drop :
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approx.
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2
bar
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Lnlet
Temperature
|
min
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15
กษ
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max
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25
กษ
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PH-Value
:
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8
~ 10
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COMPRESSED
AIR
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Pressure
:
|
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6
~ 7
bar
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Average
consumption
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approx.
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1
m3/h
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