◆ Heater Control of Center Heater

■ 설비 사양 : In-Line Sputter Machine

■ Heater Control Sensor : PT100

■ Temp. Control : max. 750℃


     RF-Power for SIO2

■ 설비 사양 : In-Line Sputter Machine

■ RF-Power : max. 10KW


     DC-Power for ITO

■ 설비 사양 : In-Line Sputter Machine

■ DC-Power : max. 12KW


     Speed Control of Winding Rollers

■ 설비 사양 : Web Coator for Capacitors film

■ Winding Speed : max. 14m/s

■ Motion Control Units : SIEMENS SIMOVET

■ Motor Type : SIEMENS AC Motor

■ Tension Control : max. 120N


     Heater Control of Evaporator

■ 설비 사양 : Web Coator for Capacitors film

■ Temp. Sensor : PT100

■ Temp. Range : max. 1400℃